TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Part No: 0100-90533

Part No: 0100-90533

Part No: A61P Quantity: 2

E15002220 This Varian Semiconductor VSEA E-E15002220 PCB Card is used working surplus

Part No:5080-192323-11 SUPPORT

FAB 060-00090-00

TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Part No: 0100-90533TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Model No: CPL Chilling Hot Plate Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components Komatsu Part No: 20001870, RCC 300 Omron Part No: E3X DA11 N (Qty. 2) TEL PCB Part No: HTE MC1 B 12, TMB2001, BOARD,CONN HPI #01 Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087