TEL Tokyo Electron 843 200mm Develop Process Station (R) Type Incomplete As-Is This RKC Temperature Controller REX-F700

This RKC Temperature Controller REX-F700 is used working surplus

5080-192525-11 MOTOR

May Require Calibration This Tylan General FC-2900MEP Mass Flow Controller MFC is used working surplus

and is missing panels and screws (see photos)

Flange: QF100 (NW100 ISO-LF) Band Style Clamp to ISO100 ISO-K

TEL Tokyo Electron 843 200mm Develop Process Station (R) Type Incomplete As-Is This RKC Temperature Controller REX-F700TEL Tokyo Electron 843 200mm Develop Process Station (R) Type Incomplete As Is Part No: 843 Sold As Is for Parts or Repair Parts List (This list is an approximation, some part numbers may not be installed or included) Part No: 2985 403906 W3 DEV BASE (12 R) ASSY Part No: 2985 519524 W1 MTR. FLANGE ASSY #01 Part No: 2986 437457 W3 12" DEV CHUCK ASSY (R) Part No: 2985 406656 W1 DEV SCAN (12R) ASSY Part No: 2986 401641 W2 12" DEV ARM1 ASSY (R) Part No: