Millipore Tylan FC-2979MEP5 8 Station MFC Mass Flow Controller Assembly Working 95% Sputtering Target AKQ515HEC Balzers

95% Sputtering Target AKQ515HEC Balzers Working

Sub Assembly Part No: 3D80-000652-V3

715-028686-002-1 This Lam Research 715-028686-002 Parallelism Alignment Tool Plate is used working surplus

Teradyne Part No: 405-236-00 A

Olympus Light Source Part No: BH2-HLSH

Millipore Tylan FC-2979MEP5 8 Station MFC Mass Flow Controller Assembly Working 95% Sputtering Target AKQ515HEC BalzersMillipore Tylan FC 2979MEP5 8 Station MFC Mass Flow Controller Assembly Working This PRI robot controller is used working surplus. The physical condition is good and clean, but there are some minor scratches from handling. Specifications Model No: FC 2979MEP5 100 sccm, C2F6 (Qty. 1) 50 sccm, CH2F2 (Qty. 1) 20 sccm, SF6 (Qty. 1) 30 sccm, C4F6 (Qty. 1) 1 SLPM, AR (Qty. 1) 20 sccm, O2 (Qty. 1) 500 sccm, CO (Qty. 1) 30 sccm, C4F8(Qty. 1) Sales Detail