Aera PI-98 PI-980 Mass Flow Controller MFC Reseller Lot of 10 Working Surplus Part No: 820-22112-00

Part No: 820-22112-00

Part No: 0021-08970

Model No: FA LL INTERLOCK

Removed from a Ultratech Stepper UltraStep 4700 Titan Wafer Stepper System This item is working surplus

Model No: im Interface Module

Aera PI-98 PI-980 Mass Flow Controller MFC Reseller Lot of 10 Working Surplus Part No: 820-22112-00Aera PI 98 PI 980 Mass Flow Controller MFC Reseller Lot of 10 Working Surplus Part No: PI 98 PI 980 Interface: DeviceNet Fitting: Surface Mount May Require Calibration Reseller Lot of 10 Made in China Included Components Part No: PI DN980CBA; 150 SCCM, Ar Part No: FCPI980CBAXDIDJAA; 300 SCCM, Ar Part No: FCPI981CBAXDIDJAA; 3OO SCCM, Ar Part No: FCPI980CBAXDIDJAA; 1000 SCCM, Ar Part No: FCPI981CBAXDIDJAA; 1500 SCCM, Ar Part No: FCPI981CBAXDIDJAA; 5000