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TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 Spare Surplus Part No: 1018-538-01

SKU: 49101363382
4.0
USD4352.63 USD4402.63

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Description

Part No: 1018-538-01

Removed from a Nikon NSR Series System This Yaskawa Electric CLSR-CA-4590N2BY1 Linear Motor PCB is used working surplus

No accessories were included and no further testing could be completed

Part No: GFZ-2160

Part No: 0200-20055

TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 Spare Surplus Part No: 1018-538-01TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 No End Effector Model No: IFB Interface Block Robotics Arm Removed from a TEL Tokyo Electron Clean Track ACT12 200 200mm System Installed Components NSK Part No: MU U177 001 NSK Part No: JS2006FN509 NSK Part No: XY HRS55ZM123 Part No: 2987 416026 W2 IRA (ACT12 IPL), Y AXIS Part No: 2987 416028 W4 IRA (ACT12 IPL), Z AXIS Part No: 2987 416027 W1 IRA (ACT12 IPL), THETA AXIS Part No: 2987

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