Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working Part No: 182-78000-00

Part No: 182-78000-00

Unit has a minor bent of the frame and is missing some of the rear cover screws (see photos)

Inventory # A-7981

img{max-width:100%} UNIT Instruments UFC-1100A Mass Flow Controller MFC 2 SLM NH3 Refurbished

This UNIT Instruments UFC-2050A Mass Flow Controller MFC 30 SLM N2 is used working surplus

Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working Part No: 182-78000-00Trikon Technologies Sigma 200 Calibration Kit 150mm 715917 A SPTS KLA Working Inventory # CONF 1614 Part No: SIGMA 200 CALIBRATION KIT Included Components Part No: 715917 A 150MM WAFER UNCOOLER SETUP DISC Part No: 715914 A GTM CASSETTE LOCATION TOOL Part No: 715900 B 150MM DEP HSE PLATEN ARM SETUP TOOL Part No: 715903 A GTM DEP ALIGNER CASSETTE SETUP TOOL Part No: 000 1293 23, Rev. B Part No: 001 9197 06, Rev. 4 T M Trikon Part No: 156311C04 150MM ARM