TEL Tokyo Electron CPHP General Chamber CPHG Lithius No Plate Assembly Untested 3Z80-000884-V1

3Z80-000884-V1

Inventory # A-8208

Inventory # A-8332

Part No: 26-169462-00

Part No: Gas Control Box

TEL Tokyo Electron CPHP General Chamber CPHG Lithius No Plate Assembly Untested 3Z80-000884-V1TEL Tokyo Electron CPHP General Chamber CPHG Lithius No Plate Assembly Untested Model No: CPHP General Chamber CPHG Removed from a TEL Tokyo Electron Clean Track Lithius System Sold As Is Installed Components PCB Part No: HTE MC1 B 12, BOARD, CONN HPI #01 PCB Part No: HTE TC3 A 11, BOARD, IF TC CTRL #03 Convum Part No: MPS E4MS GHA TLQ, MPS Omron Part No: E5ZT N08TC01 2 Omron Part No: E5ZT W08 2 This item is untested surplus and is being sold as is.